Silicon Processing for the VLSI Era, Vol. 2: Process Integration

ISBN: 0961672145

Category: Technical

Tag: Science/Engineering


Posted on 2009-02-09. By anonymous.

Description



Silicon Processing for the VLSI Era, Vol. 2: Process Integration
Publisher: Lattice Press | Pages: 752 | 1990-03 | ISBN 0961672145 | PDF | 40 MB

"Silicon Processing for the VLSI Era" is by far the most authoritative guide to semiconductor processing and nano-fabrication in existence. Practical processing techniques as well as their underlying fundamental principles are thoroughly covered in detail. This book has been indispensable to me during my graduate education and has the solution to just about every fabrication problem I have encountered in my 5+ years of experience. I highly recommend this book to anyone who is trying to build a semiconductor device or just curious about how such things are done.



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